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Nanorennes platform

Scientific coordinators: Christophe LEVALLOIS (FOTON), Maxime HARNOIS (IETR)
Technical coordinators: Rozenn GAUTHERON-BERNARD (FOTON), Olivier DE SAGAZAN (IETR)

In 2007, the Nanorennes platform was created, part of the Renatech+ network. It is a regional platform supported by the CNRS. Nanorennes consists in the pooling of technological resources of Institut Foton (OHM team) in Rennes and IETR (Microelectronics & Microsensors team). Most of the experimental research activities of the FOTON-OHM researchers are conducted within the Nanorennes platform, consisting in material growth/deposition, device processing and characterization experiments. A second aim of the platform is to provide services to academic resarchers and private companies.

The platform is constituted of two clean rooms (class 100 (ISO5) and class 1000 (ISO6)), covering an area of more than 350 m² on both sites (FOTON-OHM at INSA campus, IETR at Rennes 1 University). Nanorennes is thus covering a wide area of technological expertise in the micro-nano-fabrication: from electronic devices and sensorsto photonic devives.

Seven permanents people are involved within the platform activities, from research to services.

More details available at: